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Journal: Micromachines, 2024
Volume: 15
Number: 1230
Article:
Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching
Authors:
by
Qihui Yu, Henk-Willem Veltkamp, Remco J. Wiegerink and Joost C. Lötters
Link:
https://www.mdpi.com/2072-666X/15/10/1230
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