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Journal: Micromachines, 2024
Volume: 15
Number: 1204
Article:
Capacitance–Voltage Fluctuation of SixNy-Based Metal–Insulator–Metal Capacitor Due to Silane Surface Treatment
Authors:
by
Tae-Min Choi, Eun-Su Jung, Jin-Uk Yoo, Hwa-Rim Lee and Sung-Gyu Pyo
Link:
https://www.mdpi.com/2072-666X/15/10/1204
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