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Journal: Micromachines, 2024
Volume: 15
Number: 145

Article: A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes
Authors: by Wei Li, Fangyuan Zha, Bo Fu, Yanglong Li, Jiazhu Duan and Ziyou Zhou
Link: https://www.mdpi.com/2072-666X/15/1/145

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