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Journal: Micromachines, 2023
Volume: 14
Number: 1797
1797
Article: Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing
Authors: by Linlin Cao, Xiaolong Zhou, Yingjie Wang, Zhilun Yang, Duowen Chen, Wei Wei and Kaibao Wang
Link: https://www.mdpi.com/2072-666X/14/9/1797

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