He, G.; He, Y.; Xu, L.; Li, L.; Wang, L.; Hai, Z.; Sun, D.
La(Ca)CrO3-Filled SiCN Precursor Thin Film Temperature Sensor Capable to Measure up to 1100 °C High Temperature. Micromachines 2023, 14, 1719.
https://doi.org/10.3390/mi14091719
AMA Style
He G, He Y, Xu L, Li L, Wang L, Hai Z, Sun D.
La(Ca)CrO3-Filled SiCN Precursor Thin Film Temperature Sensor Capable to Measure up to 1100 °C High Temperature. Micromachines. 2023; 14(9):1719.
https://doi.org/10.3390/mi14091719
Chicago/Turabian Style
He, Gonghan, Yingping He, Lida Xu, Lanlan Li, Lingyun Wang, Zhenyin Hai, and Daoheng Sun.
2023. "La(Ca)CrO3-Filled SiCN Precursor Thin Film Temperature Sensor Capable to Measure up to 1100 °C High Temperature" Micromachines 14, no. 9: 1719.
https://doi.org/10.3390/mi14091719
APA Style
He, G., He, Y., Xu, L., Li, L., Wang, L., Hai, Z., & Sun, D.
(2023). La(Ca)CrO3-Filled SiCN Precursor Thin Film Temperature Sensor Capable to Measure up to 1100 °C High Temperature. Micromachines, 14(9), 1719.
https://doi.org/10.3390/mi14091719