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Journal: Micromachines, 2023
Volume: 14
Number: 1630

Article: Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
Authors: by Lucia Romano and Konstantins Jefimovs
Link: https://www.mdpi.com/2072-666X/14/8/1630

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