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Journal: Micromachines, 2023
Volume: 14
Number: 1490
Article:
Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror
Authors:
by
Lei Qian, Yameng Shan, Junduo Wang, Haoxiang Li, Kewei Wang, Huijun Yu, Peng Zhou and Wenjiang Shen
Link:
https://www.mdpi.com/2072-666X/14/8/1490
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