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Journal: Micromachines, 2023
Volume: 14
Number: 1278
1278
Article: In Situ H-Radical Surface Treatment on Aluminum Gallium Nitride for High-Performance Aluminum Gallium Nitride/Gallium Nitride MIS-HEMTs Fabrication
Authors: by Yannan Yang, Rong Fan, Penghao Zhang, Luyu Wang, Maolin Pan, Qiang Wang, Xinling Xie, Saisheng Xu, Chen Wang, Chunlei Wu, Min Xu, Jian Jin and David Wei Zhang
Link: https://www.mdpi.com/2072-666X/14/7/1278

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