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Journal: Micromachines, 2023
Volume: 14
Number: 1107
1107
Article: A Novel Scheme for Full Bottom Dielectric Isolation in Stacked Si Nanosheet Gate-All-Around Transistors
Authors: by Jingwen Yang, Ziqiang Huang, Dawei Wang, Tao Liu, Xin Sun, Lewen Qian, Zhecheng Pan, Saisheng Xu, Chen Wang, Chunlei Wu, Min Xu and David Wei Zhang
Link: https://www.mdpi.com/2072-666X/14/6/1107

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