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Journal: Micromachines, 2023
Volume: 14
Number: 1019
1019
Article: Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR
Authors: by L. Mollard, J. Riu, S. Royo, C. Dieppedale, A. Hamelin, A. Koumela, T. Verdot, L. Frey, G. Le Rhun, G. Castellan and C. Licitra
Link: https://www.mdpi.com/2072-666X/14/5/1019

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