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Journal: Micromachines, 2023
Volume: 14
Number: 611
611
Article: Impact of Stress and Dimension on Nanosheet Deformation during Channel Release of Gate-All-Around Device
Authors: by Jingwen Yang, Kun Chen, Dawei Wang, Tao Liu, Xin Sun, Qiang Wang, Ziqiang Huang, Zhecheng Pan, Saisheng Xu, Chen Wang, Chunlei Wu, Min Xu and David Wei Zhang
Link: https://www.mdpi.com/2072-666X/14/3/611

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