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Journal: MicromachinesVolume: 14Number: 611
Article: Impact of Stress and Dimension on Nanosheet Deformation during Channel Release of Gate-All-Around Device
  • Authors:
  • Jingwen Yang1,
  • Kun Chen1,2 and
  • Dawei Wang1
  • et al.
Link: https://www.mdpi.com/2072-666X/14/3/611

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