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Journal: Micromachines, 2023
Volume: 14
Number: 557
557
Article: Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films
Authors: by Laixia Nian, Yuanhang Qu, Xiyu Gu, Tiancheng Luo, Ying Xie, Min Wei, Yao Cai, Yan Liu and Chengliang Sun
Link: https://www.mdpi.com/2072-666X/14/3/557

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