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Journal: Micromachines, 2023
Volume: 14
Number: 516
516
Article: ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing
Authors: by Yuchao Zhang, Bin Miao, Guanghua Wang, Hongyu Zhou, Shiqin Zhang, Yimin Hu, Junfeng Wu, Xuechao Yu and Jiadong Li
Link: https://www.mdpi.com/2072-666X/14/3/516

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