Article Versions Notes

Zhang Y, Miao B, Wang G, Zhou H, Zhang S, Hu Y, Wu J, Yu X, Li J. ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing. Micromachines. 2023; 14(3):516. https://doi.org/10.3390/mi14030516

Zhang, Yuchao, Bin Miao, Guanghua Wang, Hongyu Zhou, Shiqin Zhang, Yimin Hu, Junfeng Wu, Xuechao Yu, and Jiadong Li. 2023. "ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing" Micromachines 14, no. 3: 516. https://doi.org/10.3390/mi14030516

Zhang, Y., Miao, B., Wang, G., Zhou, H., Zhang, S., Hu, Y., Wu, J., Yu, X., & Li, J. (2023). ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing. Micromachines, 14(3), 516. https://doi.org/10.3390/mi14030516