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Journal: Micromachines, 2023
Volume: 14
Number: 443
443
Article: MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength
Authors: by Tiago Vicentini Ferreira do Valle, Stefano Mariani, Aldo Ghisi, Biagio De Masi, Francesco Rizzini, Gabriele Gattere and Carlo Valzasina
Link: https://www.mdpi.com/2072-666X/14/2/443

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