Chen, S.; Qin, J.; Lu, Y.; Xie, B.; Wang, J.; Chen, D.; Chen, J.
An All-Silicon Resonant Pressure Microsensor Based on Eutectic Bonding. Micromachines 2023, 14, 441.
https://doi.org/10.3390/mi14020441
AMA Style
Chen S, Qin J, Lu Y, Xie B, Wang J, Chen D, Chen J.
An All-Silicon Resonant Pressure Microsensor Based on Eutectic Bonding. Micromachines. 2023; 14(2):441.
https://doi.org/10.3390/mi14020441
Chicago/Turabian Style
Chen, Siyuan, Jiaxin Qin, Yulan Lu, Bo Xie, Junbo Wang, Deyong Chen, and Jian Chen.
2023. "An All-Silicon Resonant Pressure Microsensor Based on Eutectic Bonding" Micromachines 14, no. 2: 441.
https://doi.org/10.3390/mi14020441
APA Style
Chen, S., Qin, J., Lu, Y., Xie, B., Wang, J., Chen, D., & Chen, J.
(2023). An All-Silicon Resonant Pressure Microsensor Based on Eutectic Bonding. Micromachines, 14(2), 441.
https://doi.org/10.3390/mi14020441