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Journal: Micromachines, 2023
Volume: 14
Number: 306
306
Article: Effects of Mask Material on Lateral Undercut of Silicon Dry Etching
Authors: by Yongkang Zhang, Zhongxuan Hou, Chaowei Si, Guowei Han, Yongmei Zhao, Xiaorui Lu, Jiahui Liu, Jin Ning and Fuhua Yang
Link: https://www.mdpi.com/2072-666X/14/2/306

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