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Journal: Micromachines, 2023
Volume: 14
Number: 2220
Article:
An Improved 3D OPC Method for the Fabrication of High-Fidelity Micro Fresnel Lenses
Authors:
by
Fei Peng, Chao Sun, Hui Wan and Chengqun Gui
Link:
https://www.mdpi.com/2072-666X/14/12/2220
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