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Journal: Micromachines, 2023
Volume: 14
Number: 1991
Article:
Trench Formation under the Tunable Nanogap: Its Depth Depends on Maximum Strain and Periodicity
Authors:
by
Daehwan Park, Dukhyung Lee, Mahsa Haddadi Moghaddam and Dai-Sik Kim
Link:
https://www.mdpi.com/2072-666X/14/11/1991
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