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Journal: Micromachines, 2023
Volume: 14
Number: 1854
Article:
Effect of Microwave Annealing on the Sensing Characteristics of HfO2 Thin Film for High Sensitive pH-EGFET Sensor
Authors:
by
Siwei Cui, Hui Yang, Yifei Zhang, Xing Su and Dongping Wu
Link:
https://www.mdpi.com/2072-666X/14/10/1854
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