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Journal: Micromachines, 2023
Volume: 14
Number: 1851
Article:
Methodology for Testing Key Parameters of Array-Level Small-Area Hafnium-Based Ferroelectric Capacitors Using Time-to-Digital Converter and Capacitance Calibration Circuits
Authors:
by
Donglin Zhang, Honghu Yang, Yue Cao, Zhongze Han, Yixuan Liu, Qiqiao Wu, Yongkang Han, Haijun Jiang and Jianguo Yang
Link:
https://www.mdpi.com/2072-666X/14/10/1851
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