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Journal: Micromachines, 2023
Volume: 14
Number: 231

Article: Design and Development of a MOEMS Accelerometer Using SOI Technology
Authors: by José Mireles, Jr., Ángel Sauceda, Abimael Jiménez, Manuel Ramos and Rafael Gonzalez-Landaeta
Link: https://www.mdpi.com/2072-666X/14/1/231

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