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Journal: Micromachines, 2023
Volume: 14
Number: 122

Article: Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers
Authors: by Panpan Zheng, Bingyang Cai, Tao Zhu, Li Yu, Wenjie Wu and Liangcheng Tu
Link: https://www.mdpi.com/2072-666X/14/1/122

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