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Journal: MicromachinesVolume: 13Number: 1217
Article: Q-Factor Enhancement of Coupling Bragg and Local Resonance Band Gaps in Single-Phase Phononic Crystals for TPOS MEMS Resonator
- Authors:
- Lixia Li1,2,
- Weitao He1 and
- Zhixue Tong1,*
- et al.
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