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Journal: Micromachines, 2022
Volume: 13
Number: 899
899
Article: Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process
Authors: by Quanquan Sun, Jiaxuan Tang, Lifeng Shen, Jie Lan, Zhenfeng Shen, Junfeng Xiao, Xiao Chen, Jianguo Zhang, Yu Wu, Jianfeng Xu and Xuefang Wang
Link: https://www.mdpi.com/2072-666X/13/6/899

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