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Journal: Micromachines, 2022
Volume: 13
Number: 877

Article: Effect of Substrate-RF on Sub-200 nm Al0.7Sc0.3N Thin Films
Authors: by Michele Pirro, Xuanyi Zhao, Bernard Herrera, Pietro Simeoni and Matteo Rinaldi
Link: https://www.mdpi.com/2072-666X/13/6/877

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