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Journal: Micromachines, 2022
Volume: 13
Number: 640
Article:
Comparison of Vibration-Assisted Scratch Characteristics of SiC Polytypes (3C-, 4H- and 6H-SiC)
Authors:
by
Wuqing Lin, Zhongwei Hu, Yue Chen, Yuqiang Zhang, Yiqing Yu, Xipeng Xu and Jie Zhang
Link:
https://www.mdpi.com/2072-666X/13/4/640
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