Lin, W.; Hu, Z.; Chen, Y.; Zhang, Y.; Yu, Y.; Xu, X.; Zhang, J.
Comparison of Vibration-Assisted Scratch Characteristics of SiC Polytypes (3C-, 4H- and 6H-SiC). Micromachines 2022, 13, 640.
https://doi.org/10.3390/mi13040640
AMA Style
Lin W, Hu Z, Chen Y, Zhang Y, Yu Y, Xu X, Zhang J.
Comparison of Vibration-Assisted Scratch Characteristics of SiC Polytypes (3C-, 4H- and 6H-SiC). Micromachines. 2022; 13(4):640.
https://doi.org/10.3390/mi13040640
Chicago/Turabian Style
Lin, Wuqing, Zhongwei Hu, Yue Chen, Yuqiang Zhang, Yiqing Yu, Xipeng Xu, and Jie Zhang.
2022. "Comparison of Vibration-Assisted Scratch Characteristics of SiC Polytypes (3C-, 4H- and 6H-SiC)" Micromachines 13, no. 4: 640.
https://doi.org/10.3390/mi13040640
APA Style
Lin, W., Hu, Z., Chen, Y., Zhang, Y., Yu, Y., Xu, X., & Zhang, J.
(2022). Comparison of Vibration-Assisted Scratch Characteristics of SiC Polytypes (3C-, 4H- and 6H-SiC). Micromachines, 13(4), 640.
https://doi.org/10.3390/mi13040640