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Journal: Micromachines, 2022
Volume: 13
Number: 625
625
Article: Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
Authors: by Chris Stoeckel, Katja Meinel, Marcel Melzer, Agnė Žukauskaitė, Sven Zimmermann, Roman Forke, Karla Hiller and Harald Kuhn
Link: https://www.mdpi.com/2072-666X/13/4/625

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