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Journal: Micromachines, 2022
Volume: 13
Number: 619

Article: Design and Testing of a Non-Contact MEMS Voltage Sensor Based on Single-Crystal Silicon Piezoresistive Effect
Authors: by Jiachen Li, Jun Liu, Chunrong Peng, Xiangming Liu, Zhengwei Wu and Fengjie Zheng
Link: https://www.mdpi.com/2072-666X/13/4/619

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