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Journal: Micromachines, 2022
Volume: 13
Number: 601

Article: Simulation and Optimization of a Planar-Type Micro-Hotplate with Si3N4-SiO2 Transverse Composite Dielectric Layer and Annular Heater
Authors: by Guangfen Wei, Pengfei Wang, Meihua Li, Zhonghai Lin and Changxin Nai
Link: https://www.mdpi.com/2072-666X/13/4/601

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