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Journal: Micromachines, 2022
Volume: 13
Number: 524

Article: Structure Fabrication on Silicon at Atomic and Close-To-Atomic Scale Using Atomic Force Microscopy: Implications for Nanopatterning and Nanodevice Fabrication
Authors: by Paven Thomas Mathew, Wei Han, Brian J. Rodriguez and Fengzhou Fang
Link: https://www.mdpi.com/2072-666X/13/4/524

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