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Sapienza S, Ferri M, Belsito L, Marini D, Zielinski M, La Via F, Roncaglia A. Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on <111> and <100> Silicon. Micromachines. 2021; 12(9):1072. https://doi.org/10.3390/mi12091072

Sapienza, Sergio, Matteo Ferri, Luca Belsito, Diego Marini, Marcin Zielinski, Francesco La Via, and Alberto Roncaglia. 2021. "Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on <111> and <100> Silicon" Micromachines 12, no. 9: 1072. https://doi.org/10.3390/mi12091072

Sapienza, S., Ferri, M., Belsito, L., Marini, D., Zielinski, M., La Via, F., & Roncaglia, A. (2021). Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on <111> and <100> Silicon. Micromachines, 12(9), 1072. https://doi.org/10.3390/mi12091072