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Materials 2016, 9(4), 233;

Rapid Fabrication of High-Aspect-Ratio Platinum Microprobes by Electrochemical Discharge Etching

Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055, China
Author to whom correspondence should be addressed.
Academic Editor: Douglas Ivey
Received: 10 February 2016 / Revised: 20 March 2016 / Accepted: 23 March 2016 / Published: 25 March 2016
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Using a graphite crucible as the counter-electrode, platinum microprobes with an aspect ratio of 30 and a tip apex radius less than 100 nm were fabricated by an electrochemical discharge etching process. The “neck-in” structure on the platinum wire induced by the electrical discharge at the liquid-air interface plays a key role in the probe shape and the voltage of the following pure electrochemical etching determines the final probe aspect ratio and tip dimensions. Moreover, the shape and diameter of the graphite counter-electrode also exhibit a significant effect on the realization of high-aspect-ratio probes. The method presented here provides a simple and rapid approach to the fabrication of micro-tools for micromachining, micromanipulation, as well as biomedical applications. View Full-Text
Keywords: electrochemical discharge etching; microprobes; aspect ratio electrochemical discharge etching; microprobes; aspect ratio

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Zhang, M.; Lian, X. Rapid Fabrication of High-Aspect-Ratio Platinum Microprobes by Electrochemical Discharge Etching. Materials 2016, 9, 233.

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