Effect of Annealing Temperature on the Water Contact Angle of PVD Hard Coatings
Abstract
:1. Introduction
2. Experimental Details
2.1. Coatings Preparation
Coatings | AlN | Cr2N | (CrAl)2N | Si-DLC | Cr-DLC |
---|---|---|---|---|---|
Flow rate Ar/N2/C2H2 (sccm) | 30/12/0 | 34/16/0 | 30/20/0 | 35/0/0 | 25/5/20 |
Working pressure (Pa) | 0.40 | 0.41 | 0.47 | 0.38 | 0.43 |
Target materials | Al × 2 | Cr × 2 | Cr × 3 + Al × 1 | C × 3 + Si × 1 | Cr × 2 |
Target current (A) | Al 6A | Cr 5A | Cr 4A + (Cr + Al) 1A | C 3A + (C + Si) 1.5A | Cr 5A |
Substrate Bias Frequency (kHz) | 40 | 130 | 150 | 100 | 70 |
Negative bias of substrate (−V) | 100 | 50 | 100 | 60 | 75 |
Rotation speed of specimen (rpm) | 5 | 9 | 7 | 9 | 9 |
Distance, target to specimen (cm) | 7 | 11 | 11 | 9 | 13 |
Deposition time (min) | 420 | 25 | 60 | 150 | 80 |
As-deposited roughness (nm) | 54 | 4 | 13 | 3 | 6 |
Annealing temperature (°C) | 300, 600–800 | 300–800 | 300, 600–800 | 200–600 | 200, 300 |
2.2. Post Annealing of Coatings
2.3. Characterization
3. Results and Discussion
4. Conclusions
- The as-deposited hcp-AlN, Cr2N and (CrAl)2N coatings exhibit hydrophobic behavior and respectively possess WCAs of 119°, 106° and 101°. On the contrary, the as-deposited Si-DLC and Cr-DLC coatings exhibit hydrophilic behavior and respectively possess WCAs of 74° and 88°.
- The annealed Cr2N and (CrAl)2N coatings are characterized by hydrophobic behavior with higher degrees of WCA. The annealed hcp-AlN coating is characterized by hydrophilic behavior and differs from the as-deposited one. Both the annealed Si-DLC and Cr-DLC are hydrophilic.
- The annealed Cr2N coating exhibits the best anti-sticking property with the highest WCA. As the annealing temperature rises to 700 °C, the WCA increases to 115°. The increase of WCA is the result of the retained Cr2N and the increased roughness. According to the roughness results as shown by SEM and XRD, the rougher surface of the annealed Cr2N and (CrAl)2N is due to the formation and growth of Cr2O3 crystals on the coating’s surface.
- For the 600 °C annealed (CrAl)2N coating, the WCA decreases to 90° and the roughness only slightly increases to 20 nm. The decrease of the WCA is caused by the formation of the Cr2O3 and Al2O3 on the coating surface. The WCA of the 800 °C annealed (CrAl)2N coating has a WCA of 101° with retained (CrAl)2N and a rougher surface. The increase in WCA is caused by the retained (CrAl)2N and increased roughness.
- There is no obvious difference of roughness between the as-deposited and the annealed hcp-AlN coatings. The lower WCA of the annealed hcp-AlN coatings is related to the Al2O3 thin film on the coating, meaning that the WCA of the annealed hcp-AlN is related to the crystal structure and has little correlation with roughness.
- The roughness of both the as-deposited and annealed Si-DLC and Cr-DLC coatings is stable. This indicates that the WCAs of the annealed Si-DLC and Cr-DLC coatings are related to the crystal structure and has little correlation with roughness.
Acknowledgments
Conflict of Interest
References
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Yang, Y.-S.; Cho, T.-P. Effect of Annealing Temperature on the Water Contact Angle of PVD Hard Coatings. Materials 2013, 6, 3373-3386. https://doi.org/10.3390/ma6083373
Yang Y-S, Cho T-P. Effect of Annealing Temperature on the Water Contact Angle of PVD Hard Coatings. Materials. 2013; 6(8):3373-3386. https://doi.org/10.3390/ma6083373
Chicago/Turabian StyleYang, Yu-Sen, and Ting-Pin Cho. 2013. "Effect of Annealing Temperature on the Water Contact Angle of PVD Hard Coatings" Materials 6, no. 8: 3373-3386. https://doi.org/10.3390/ma6083373
APA StyleYang, Y.-S., & Cho, T.-P. (2013). Effect of Annealing Temperature on the Water Contact Angle of PVD Hard Coatings. Materials, 6(8), 3373-3386. https://doi.org/10.3390/ma6083373