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Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts
Open AccessArticle

Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure

Department of Micro and Nano Systems Technology (IMST), Vestfold University College (HiVe), P.O. Box 2243, Tonsberg N-3130, Norway
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Materials 2013, 6(8), 3160-3170; https://doi.org/10.3390/ma6083160
Received: 21 May 2013 / Revised: 19 July 2013 / Accepted: 22 July 2013 / Published: 26 July 2013
(This article belongs to the Special Issue Carbon Nanotubes)
Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission imaging in scanning electron microscopy—S(T)EM. The characterization is performed directly on the microsystem, without any post-synthesis processing required. The results show an effect of temperature on the structure of CNTs: high temperature favors thin and regular structures, whereas low temperature favors “bamboo-like” structures. View Full-Text
Keywords: carbon nanotubes; defects; disorder; local synthesis; scanning transmission electron microscopy carbon nanotubes; defects; disorder; local synthesis; scanning transmission electron microscopy
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Ta, B.Q.; Haugen, T.B.; Hoivik, N.; Halvorsen, E.; Aasmundtveit, K.E. Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure. Materials 2013, 6, 3160-3170.

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