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Journal: Materials, 2024
Volume: 17
Number: 5734
5734
Article: Investigating Structural and Surface Modifications in Ion-Implanted 4H-SiC for Enhanced Dopant Distribution Analysis in Power Semiconductors
Authors: by Taehun Jang, Mirang Byeon, Minji Kang, Sang-Gil Lee, Ji Hyun Lee, Sang-Geul Lee, Won Ja Min and Tae Eun Hong
Link: https://www.mdpi.com/1996-1944/17/23/5734

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