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Journal: Materials, 2023
Volume: 16
Number: 2331
Article:
Synthesis of Acrylate Dual-Tone Resists and the Effect of Their Molecular Weight on Lithography Performance and Mechanism: An Investigation
Authors:
by
Lifei Liu, Jintong Li, Ting Song, Rong Wu, Weizhen Zhao and Feng Huo
Link:
https://www.mdpi.com/1996-1944/16/6/2331
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