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Journal: Materials, 2023
Volume: 16
Number: 2169

Article: Homogeneity and Thermal Stability of Sputtered Al0.7Sc0.3N Thin Films
Authors: by José Manuel Carmona-Cejas, Teona Mirea, Jesús Nieto, Jimena Olivares, Valery Felmetsger and Marta Clement
Link: https://www.mdpi.com/1996-1944/16/6/2169

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