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Journal: Materials, 2022
Volume: 15
Number: 2661

Article: Effects of Ti Target Purity and Microstructure on Deposition Rate, Microstructure and Properties of Ti Films
Authors: by Liming Liu, Wuhui Li, Haoliang Sun and Guangxin Wang
Link: https://www.mdpi.com/1996-1944/15/7/2661

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