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Journal: Materials, 2022
Volume: 15
Number: 7770

Article: Study on the Deposition Uniformity of Triple-Target Magnetron Co-Sputtering System: Numerical Simulation and Experiment
Authors: by Guo Zhu, Baijun Xiao, Ganxin Chen and Zhiyin Gan
Link: https://www.mdpi.com/1996-1944/15/21/7770

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