Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser
Abstract
:1. Introduction
2. Theoretical Background
3. Experimental Processes and Sample Tests
3.1. Materials and Laser Irradiation
3.2. Characterization
4. Results and Discussion
4.1. Ultrafast Electron and Lattice Dynamics
4.2. Surface Micro-Nano Structure Characteristics
4.3. Phase Transition Mechanism
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
- Akinwande, D.; Huyghebaert, C.; Wang, C.-H.; Serna, M.I.; Goossens, S.; Li, L.-J.; Wong, H.S.P.; Koppens, F.H.L. Graphene and two-dimensional materials for silicon technology. Nature 2019, 573, 507–518. [Google Scholar] [CrossRef] [PubMed]
- Kumar, K.; Lee, K.; Herman, P.R.; Nogami, J.; Kherani, N.P. Femtosecond laser direct hard mask writing for selective facile micron-scale inverted-pyramid patterning of silicon. Appl. Phys. Lett. 2012, 101, 222106. [Google Scholar] [CrossRef]
- Randall, J.; Lyding, J.; Schmucker, S.; Ehr, J.; Ballard, J.; Saini, R.; Xu, H.; Ding, Y. Atomic precision lithography on Si. J. Vac. Sci. Technol. B Microelectron. Nanometer Struct. 2009, 27, 2764–2768. [Google Scholar] [CrossRef]
- Hung, N.P.; Fu, Y.Q.; Ali, M.Y. Focused ion beam machining of silicon. J. Mater. Process. Technol. 2002, 127, 256–260. [Google Scholar] [CrossRef]
- Gattass, R.R.; Mazur, E. Femtosecond laser micromachining in transparent materials. Nat. Photonics 2008, 2, 219–225. [Google Scholar] [CrossRef]
- Bisht, A.; Kalsar, R.; Adak, A.; Dey, I.; Jana, K.; Lad, A.; Kumar, G.R.; Jagadeesh, G.; Suwas, S. Observation of ex-situ microstructure relaxation of non-conventional misorientations post femtosecond laser shock exposure in cp-Ti. Acta Mater. 2018, 150, 161–172. [Google Scholar] [CrossRef]
- Mahdieh, M.H.; Gharibzadeh, M. 3-Dimensional simulation and footprint of optical breakdown in dielectrics induced by femtosecond laser pulse. Opt. Laser Technol. 2012, 44, 1713–1721. [Google Scholar] [CrossRef]
- Yong, J.; Bai, X.; Yang, Q.; Hou, X.; Chen, F. Filtration and removal of liquid polymers from water (polymer/water separation) by use of the underwater superpolymphobic mesh produced with a femtosecond laser. J. Colloid Interface Sci. 2021, 582, 1203–1212. [Google Scholar] [CrossRef]
- Chen, Y.; Cao, Y.; Wang, Y.; Zhang, L.; Shao, G.; Zi, J. Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses. Ceram. Int. 2020, 46, 11747–11761. [Google Scholar] [CrossRef]
- Sun, T.; Huo, J.; Xiao, Y.; Liu, L.; Feng, B.; Zhai, X.; Wang, W.; Zou, G. Atomic Bonding-Engineered Heterogeneous Integration of Semiconductor Nanowires by Femtosecond Laser Irradiation for a Miniaturized Photodetector. Appl. Surf. Sci. 2021, 575, 151709. [Google Scholar] [CrossRef]
- Okano, K.; Hsu, H.-Y.; Li, Y.-K.; Masuhara, H. In situ patterning and controlling living cells by utilizing femtosecond laser. J. Photochem. Photobiol. C Photochem. Rev. 2016, 28, 1–28. [Google Scholar] [CrossRef]
- Ali, B.; Litvinyuk, I.V.; Rybachuk, M. Femtosecond laser micromachining of diamond: Current research status, applications and challenges. Carbon 2021, 179, 209–226. [Google Scholar] [CrossRef]
- Huang, M.; Zhao, F.; Cheng, Y.; Xu, N.; Xu, Z. Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser. ACS Nano 2009, 3, 4062–4070. [Google Scholar] [CrossRef] [PubMed]
- Stephan, G.F.; Clemens, K.; Sebastian, E.; Thibault, D.; Frank, M. Femtosecond Laser-Induced Periodic Surface Structures on Fused Silica: The Impact of the Initial Substrate Temperature. Materials 2018, 11, 1340. [Google Scholar]
- Liang, F.; Vallée, R.; Chin, S.L. Mechanism of nanograting formation on the surface of fused silica. Opt. Express 2012, 20, 4389–4396. [Google Scholar] [CrossRef]
- Rebollar, E.; Castillejo, M.; Ezquerra, T.A. Laser induced periodic surface structures on polymer films: From fundamentals to applications. Eur. Polym. J. 2015, 73, 162–174. [Google Scholar] [CrossRef] [Green Version]
- Zhang, D.; Liu, R.; Li, Z. Irregular LIPSS produced on metals by single linearly polarized femtosecond laser. Int. J. Extrem. Manuf. 2022, 4, 015102. [Google Scholar] [CrossRef]
- Sokolowski-Tinten, K.; Bonse, J.; Barty, A.; Chapman, H.; Bajt, S.; Bogan, M.; Boutet, S.; Cavalleri, A.; Düsterer, s.; Frank, M.; et al. In-situ observation of the formation of laser-induced periodic surface structures with extreme spatial and temporal resolution. arXiv 2022, arXiv:2206.04556. [Google Scholar]
- Driel, H.; Young, J.F.; Sipe, J.E. Laser Induced Periodic Surface Structure: An Experimental And Theoretical Review. Mrs Online Proc. Libr. Arch. 1982, 13, 302–318. [Google Scholar]
- Sipe, J.E.; Driel, H. Laser Induced Periodic Surface Structure: An Experimental And Theoretical Review. In Proceedings of the Trends in Quantum Electronics, Bucharest, Romania, 29 August–3 September 1989. [Google Scholar]
- Bonse, J.; Rosenfeld, A.; Krüger, J. Implications of transient changes of optical and surface properties of solids during femtosecond laser pulse irradiation to the formation of laser-induced periodic surface structures. Appl. Surf. Sci. 2011, 257, 5420–5423. [Google Scholar] [CrossRef]
- Zhang, D.; Ranjan, B.; Tanaka, T.; Sugioka, K. Carbonized Hybrid Micro/Nanostructured Metasurfaces Produced by Femtosecond Laser Ablation in Organic Solvents for Biomimetic Antireflective Surfaces. ACS Appl. Nano Mater. 2020, 3, 1855–1871. [Google Scholar] [CrossRef] [Green Version]
- Tsibidis, G.D.; Skoulas, E.; Papadopoulos, A.; Stratakis, E. Convection roll-driven generation of supra-wavelength periodic surface structures on dielectrics upon irradiation with femtosecond pulsed lasers. Phys. Rev. B 2016, 94, 081305. [Google Scholar] [CrossRef] [Green Version]
- Zhang, D.S.; Li, X.Z.; Fu, Y.; Yao, Q.H.; Li, Z.G. Koji Sugioka Liquid vortexes and flows induced by femtosecond laser ablation in liquid governing formation of circular and crisscross LIPSS. Opto Electron. Adv. 2022, 5, 210066. [Google Scholar] [CrossRef]
- Abou Saleh, A. Relationship between Selforganization and Creation/Resorption of Microstructural Defects under Ultrashort Laser Irradiation. Ph.D. Thesis, University Jean Monnet, Lyon, France, 2020. [Google Scholar]
- Rapp, L.; Haberl, B.; Pickard, C.J.; Bradby, J.E.; Gamaly, E.G.; Williams, J.S.; Rode, A.V. Experimental evidence of new tetragonal polymorphs of silicon formed through ultrafast laser-induced confined microexplosion. Nat. Commun. 2015, 6, 7555. [Google Scholar] [CrossRef] [Green Version]
- Tan, D.; Sharafudeen, K.N.; Yue, Y.; Qiu, J. Femtosecond laser induced phenomena in transparent solid materials: Fundamentals and applications. Prog. Mater. Sci. 2016, 76, 154–228. [Google Scholar] [CrossRef]
- Bonse, J.; Grf, S. Maxwell Meets Marangoni—A Review of Theories on Laser—Induced Periodic Surface Structures. Laser Photonics Rev. 2020, 14, 2000215. [Google Scholar] [CrossRef]
- Juodkazis, S.; Nishimura, K.; Tanaka, S.; Misawa, H.; Gamaly, E.G.; Luther-Davies, B.; Hallo, L.; Nicolai, P.; Tikhonchuk, V.T. Laser-Induced Microexplosion Confined in the Bulk of a Sapphire Crystal: Evidence of Multimegabar Pressures. Phys. Rev. Lett. 2006, 96, 166101. [Google Scholar] [CrossRef] [PubMed] [Green Version]
- Gamaly, E.G.; Rapp, L.; Roppo, V.; Juodkazis, S.; Rode, A.V. Generation of high energy density by fs-laser-induced confined microexplosion. New J. Phys. 2013, 15, 025018. [Google Scholar] [CrossRef]
- Zhao, J.H.; Li, X.B.; Chen, Q.D.; Chen, Z.G.; Sun, H.B. Ultrafast laser induced black silicon, from micro-nanostructuring, infrared absorption mechanism, to high performance detecting devices. Mater. Today Nano 2020, 11, 100078. [Google Scholar] [CrossRef]
- Levy, Y.; Derrien, T.J.Y.; Bulgakova, N.M.; Gurevich, E.L.; Mocek, T. Relaxation dynamics of femtosecond-laser-induced temperature modulation on the surfaces of metals and semiconductors. Appl. Surf. Sci. 2016, 374, 157–164. [Google Scholar] [CrossRef]
- Tsibidis, G.D.; Barberoglou, M.; Loukakos, P.A.; Stratakis, E.; Fotakis, C. Dynamics of ripple formation on silicon surfaces by ultrashort laser pulses in sub-ablation conditions. arXiv 2011, arXiv:1109.2568. [Google Scholar]
- Tsibidis, G.D.; Stratakis, E. Ripple formation on silver after irradiation with radially polarised ultrashort-pulsed lasers. J. Appl. Phys. 2017, 121, 163106. [Google Scholar] [CrossRef]
- Anisimov, S.I.; Kapeliovich, B.L.; Perel’Man, T.L. Electron emission from metal surface exposed to ultrashort laser pulses. Sov. J. Exp. Theor. Phys. 1974, 39, 375–377. [Google Scholar]
- Bulgakova, N.M.; Stoian, R.; Rosenfeld, A.; Marine, W.; Campbell, E.E.B. A general continuum approach to describe fast electronic transport in pulsed laser irradiated materials: The problem of Coulomb explosion. Int. Soc. Opt. Photonics 2005, 81, 345–356. [Google Scholar] [CrossRef]
- Sipe, J.E.; Young, J.F.; Preston, J.S.; van Driel, H.M. Laser-induced periodic surface structure. I. Theory. Phys. Rev. B 1983, 27, 1141–1154. [Google Scholar] [CrossRef]
- Bäuerle, D. Laser Processing and Chemistry; Springer: Berlin/Heidelberg, Germany, 2011. [Google Scholar]
- Sokolowski-Tinten, K.; von der Linde, D. Generation of dense electron-hole plasmas in silicon. Phys. Rev. B 2000, 61, 2643–2650. [Google Scholar] [CrossRef] [Green Version]
- Colombier, J.-P.; Rudenko, A.; Silaeva, E.; Zhang, H.; Sedao, X.; Bévillon, E.; Reynaud, S.; Maurice, C.; Pigeon, F.; Garrelie, F.; et al. Mixing periodic topographies and structural patterns on silicon surfaces mediated by ultrafast photoexcited charge carriers. Phys. Rev. Res. 2020, 2, 043080. [Google Scholar] [CrossRef]
- Quiroga-González, E.; Carstensen, J.; Glynn, C.; O’Dwyer, C.; Föll, H. Pore size modulation in electrochemically etched macroporous p-type silicon monitored by FFT impedance spectroscopy and Raman scattering. Phys. Chem. Chem. Phys. Camb. R. Soc. Chem. 2014, 16, 255–263. [Google Scholar] [CrossRef]
- Miyazaki, K.; Miyaji, G. Periodic Nanostructure Formation on Silicon Irradiated with Multiple Low-fluence Femtosecond Laser Pulses in Water. Phys. Procedia 2012, 39, 674–682. [Google Scholar] [CrossRef] [Green Version]
- Izawa, Y.; Izawa, Y.; Setsuhara, Y.; Hashida, M.; Fujita, M.; Sasaki, R.; Nagai, H.; Yoshida, M. Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation. Applied Physics Letters 2007, 90, 044107. [Google Scholar] [CrossRef]
- Florian, C.; Fischer, D.; Freiberg, K.; Duwe, M.; Bonse, J. Single Femtosecond Laser-Pulse-Induced Superficial Amorphization and Re-Crystallization of Silicon. Materials 2021, 14, 1651. [Google Scholar] [CrossRef] [PubMed]
- Wen, C.; Yang, Y.J.; Ma, Y.J.; Shi, Z.Q.; Wang, Z.J.; Mo, J.; Li, T.C.; Li, X.H.; Hu, S.F.; Yang, W.B. Sulfur-hyperdoped silicon nanocrystalline layer prepared on polycrystalline silicon solar cell substrate by thin film deposition and nanosecond-pulsed laser irradiation. Appl. Surf. Sci. 2019, 476, 49–60. [Google Scholar] [CrossRef]
- Bonse, J.; Brzezinka, K.W.; Meixner, A.J. Modifying single-crystalline silicon by femtosecond laser pulses: An analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy. Appl. Surf. Sci. 2004, 221, 215–230. [Google Scholar] [CrossRef]
- Crawford, T.; Yamanaka, J.; Botton, G.A.; Haugen, H.K. High-resolution observations of an amorphous layer and subsurface damage formed by femtosecond laser irradiation of silicon. J. Appl. Phys. 2008, 103, 215–453. [Google Scholar] [CrossRef]
- Schade, M.; Varlamova, O.; Reif, J.; Blumtritt, H.; Erfurth, W.; Leipner, H.S. High-resolution investigations of ripple structures formed by femtosecond laser irradiation of silicon. Anal. Bioanal. Chem. 2010, 396, 1905–1911. [Google Scholar] [CrossRef] [Green Version]
- Feng, Q.; Picard, Y.N.; Liu, H.; Yalisove, S.M.; Mourou, G.; Pollock, T.M. Femtosecond laser micromachining of a single-crystal superalloy. Scr. Mater. 2005, 53, 511–516. [Google Scholar] [CrossRef]
- Schoenfelder, S.; Bagdahn, J.; Baumann, S.; Kray, D.; Christiansen, S. Strength Characterization of Laser Diced Silicon for Application in Solar Industry. In Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 4–8 September 2006. [Google Scholar]
- Amer, M.S.; Dosser, L.; LeClair, S.; Maguire, J.F. Induced stresses and structural changes in silicon wafers as a result of laser micro-machining. Appl. Surf. Sci. 2002, 187, 291–296. [Google Scholar] [CrossRef]
- Sokolowski-Tinten, K.; Bialkowski, J.; Cavalleri, A.; von der Linde, D.; Oparin, A.; Meyer-Ter-Vehn, J.; Anisimov, S. Transient States of Matter during Short Pulse Laser Ablation. Phys. Rev. Lett. 1998, 81, 224–227. [Google Scholar] [CrossRef] [Green Version]
- Borowiec, A.; Bruce, D.M.; Cassidy, D.T.; Haugen, H.K. Imaging the strain fields resulting from laser micromachining of semiconductors. Appl. Phys. Lett. 2003, 83, 225–227. [Google Scholar] [CrossRef]
- Smith, M.; Sher, M.-J.; Franta, B.; Lin, Y.-T.; Mazur, E.; Gradečak, S. The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation. J. Appl. Phys. 2012, 112, 083518. [Google Scholar] [CrossRef]
- Smith, M.; Lin, Y.-T.; Sher, M.-J.; Winkler, M.; Mazur, E.; Gradečak, S. Pressure-induced phase transformations during femtosecond-laser doping of silicon. J. Appl. Phys. 2011, 110, 053524. [Google Scholar] [CrossRef]
- Cavalleri, A.; Sokolowski-Tinten, K.; Bialkowski, J.; Schreiner, M.; von der Linde, D. Femtosecond melting and ablation of semiconductors studied with time of flight mass spectroscopy. J. Appl. Phys. 1999, 85, 3301–3309. [Google Scholar] [CrossRef] [Green Version]
Symbol | Nomenclature | Values | Unite |
---|---|---|---|
CA | Auger recombination coefficient | 3.8 × 10−43 | m6/s |
Ce | Electron specific heat capacity | 3kBNe | J/(m3·K) |
Cl | Lattice specific heat capacity | W/(m·K) | |
c | Light speed | 3 × 108 | m/s |
e | Electric charge | 1.6 × 10−19 | C |
E0 | Bandgap energy | eV | |
Je | Electron generation | (m3·s)−1 | |
ke | Electronic thermal conductivity | W/(m·K) | |
kl | Electronic thermal conductivity | J/(m3·K) | |
m* | Effective optical mass | 1.64 × 10−31 | kg |
Nt | Threshold density for electron-photon coupling | 6.02 × 1026 | m−3 |
N0 | Total valance band density | 2 × 1029 | m−3 |
n0 | Atomic density of Si | 5 × 1028 | m−3 |
Pe | Auger recombination | m−3 | |
tp | Pulse duration | 300 | fs |
μe | Carrier mobility | m2·V−1·s−1 | |
Carrier collision frequency | 7.87 × 1014 | Hz | |
λ | Wavelength | 1030 | nm |
Laser angular frequency | 2πc/λ | s−1 | |
Plasma frequency | s−1 | ||
Energy coupling rate between electron and lattice | W/(m3·K) | ||
Electron-photon coupling time | s | ||
Minimum electron-photon coupling time | 2.4 × 10−13 | s | |
Minimum Auger recombination time | 6 × 10−12 | s | |
Modulation amplitude | 0.15 | - | |
One-photon absorption | 1.021 × 105 | m−1 | |
Two-photon absorption | 1 × 10−10 | m/W | |
Impact ionization coefficient | s−1 |
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Liu, Y.; Ding, Y.; Xie, J.; Chen, M.; Yang, L.; Lv, X.; Yuan, J. Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser. Materials 2022, 15, 4897. https://doi.org/10.3390/ma15144897
Liu Y, Ding Y, Xie J, Chen M, Yang L, Lv X, Yuan J. Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser. Materials. 2022; 15(14):4897. https://doi.org/10.3390/ma15144897
Chicago/Turabian StyleLiu, Yanan, Ye Ding, Jichang Xie, Mingjun Chen, Lijun Yang, Xun Lv, and Julong Yuan. 2022. "Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser" Materials 15, no. 14: 4897. https://doi.org/10.3390/ma15144897