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Journal: Materials, 2021
Volume: 14
Number: 1722

Article: Growth of Semi-Polar (101¯3) AlN Film on M-Plane Sapphire with High-Temperature Nitridation by HVPE
Authors: by Xu Li, Jianyun Zhao, Ting Liu, Yong Lu and Jicai Zhang
Link: https://www.mdpi.com/1996-1944/14/7/1722

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