Structure and Properties of ZrON Coatings Synthesized by Cathodic Arc Evaporation
Abstract
:1. Introduction
2. Materials and Methods
2.1. Coating Deposition
2.2. Coating Characterization
- I(hkl)—the measured diffraction line intensity,
- Io(hkl)—diffraction line standard intensity given in JCPDS database,
- n—number of diffraction lines analyzed.
3. Results
3.1. Color of the Coatings
3.2. Morphology
3.3. Chemical Composition
3.4. Structure
3.5. Hardness
3.6. Adhesion
4. Discussion
5. Conclusions
- –
- the coatings showed good decorative properties. The ZrN coating color is light yellow and darkens with increase of oxygen concentration to graphite for Zr-O phase,
- –
- deposition rate—a decrease in this parameter was observed with an increase in O2(x) during deposition. It is probably connected with the target poisoning,
- –
- the lowest macroparticle density on the surface was for ZrON coatings synthesized at O2(x) = 10%. The surface macroparticle density increased with O2(x),
- –
- in ZrON coatings the texture dependence on the O2(x) was observed. In the coatings formed at low O2(x), ranged from 10% to 30%, no diffraction lines of the Zr-O phases were registered, only the crystal structure from the ZrN phase,
- –
- a small increase in hardness for the coating deposited with the lowest relative oxygen concentration was observed. It can be related to lattice distortions as an effect of oxygen introduction into the ZrN lattice. Then the hardness and elastic modulus decrease with O2(x) increase,
- –
- adhesion of ZrON coatings strongly depended on oxygen concentration. For ZrN coating critical force was about 80 N and decreased to about 26 N for coating deposited at O2(x) = 100%.
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
- Huang, J.H.; Tsai, Z.E.; Yu, G.P. Mechanical properties and corrosion resistance of nanocrystalline ZrNxOy coatings on AISI 304 stainless steel by ion plating. Surf. Coat. Technol. 2008, 202, 4992–5000. [Google Scholar] [CrossRef]
- Niyomsoan, S.; Grant, W.; Olson, D.L.; Mishra, B. Variation of color in titanium and zirconium nitride decorative thin films. Thin Solid Films 2002, 415, 187–194. [Google Scholar] [CrossRef]
- Andreyev, M.; Anishchik, V.; Markova, L.; Kuznetsova, T. Ion-beam coatings based on Ni and Cr with ultradispersed diamonds—Structure and properties. Vacuum 2005, 78, 451–454. [Google Scholar] [CrossRef]
- Andreev, M.A.; Kuznetsova, T.A.; Markova, L.V.; Chekan, V.A. Wear resistance of composite chrome coatings with additives of utlradispersed diamonds. J. Frict. Wear 2001, 22, 423–428. [Google Scholar]
- Vityaz, P.A.; Komarov, A.I.; Komarova, V.I.; Kuznetsova, T.A. Peculiarities of triboformation of wear-resistant layers on the surface of a MAO-coating modified by fullerenes. J. Frict. Wear 2011, 32, 231–241. [Google Scholar] [CrossRef]
- Carvalho, P.; Fernandes, A.C.; Rebouta, L.; Vaz, F.; Cunha, L.; Kreissig, U.; Barradas, N.P.; Ramos, A.R.; Alves, E. Compositional and structural changes in ZrOxNy films depending on growth condition. Nucl. Instrum. Meth. B 2006, 249, 458–461. [Google Scholar] [CrossRef]
- Choi, H.; Jang, J.; Zhang, T.; Kim, J.H.; Park, I.W.; Kim, K.H. Effect of Si addition on the microstructure, mechanical properties and tribological properties of Zr–Si–N nanocomposite coatings deposited by a hybrid coating system. Surf. Coat. Technol. 2014, 259, 707–713. [Google Scholar] [CrossRef]
- Pilloud, D.; Pierson, J.F.; Marques, A.P.; Cavaleiro, A. Structural changes in Zr–Si–N films vs. their silicon content. Surf. Coat. Technol. 2004, 180–181, 352–356. [Google Scholar] [CrossRef]
- Nose, M.; Chiou, W.A.; Zhou, M.; Mae, T.; Meshii, M. Microstructure and mechanical properties of Zr–Si–N films prepared by rf-reactive sputtering. J. Vac. Sci. Technol. A 2002, 20, 823–828. [Google Scholar] [CrossRef]
- Sandu, C.S.; Sanjinés, R.; Medjani, F. Control of morphology (ZrN crystallite size and SiNx layer thickness) in Zr–Si–N nanocomposite thin films. Surf. Coat. Technol. 2008, 202, 2278–2281. [Google Scholar] [CrossRef]
- Hsiao, H.W.; Huang, J.H.; Yu, G.P. Effect of oxygen on fracture toughness of Zr(N,O) hard coatings. Surf. Coat. Technol. 2016, 304, 330–339. [Google Scholar] [CrossRef]
- Trenczek-Zajac, A.; Radecka, M.; Zakrzewska, K.; Brudnik, A.; Kusior, E.; Bourgeois, S.; Marco de Lucas, M.C.; Imhoff, L. Structural and electrical properties of magnetron sputtered Ti(ON) thin films: The case of TiN doped in situ with oxygen. J. Power Sources 2009, 194, 93–103. [Google Scholar] [CrossRef]
- Da Silva Oliveira, C.I.; Martinez-Martinez, D.; Cunha, L.; Rodrigues, M.S.; Borges, J.; Lopes, C.; Alves, E.; Barradas, N.P.; Apreutesei, M. Zr-O-N coatings for decorative purposes: Study of the system stability by exploration of the deposition parameter space. Surf. Coat. Technol. 2018, 343, 30–37. [Google Scholar] [CrossRef]
- Klumdoung, P.; Buranawong, A.; Chaiyakun, S.; Limsuwan, P. Variation of color in Zirconium nitride thin films prepared at high Ar flow rates with reactive dc magnetron sputtering. Procedia Eng. 2012, 32, 916–921. [Google Scholar] [CrossRef] [Green Version]
- Carvalho, P.; Vaz, F.; Rebouta, T.L.; Carvalho, S.; Cunha, L.; Goudeau, P.; Riviere, J.P.; Alves, E.; Cavaleiro, A. Structural stability of decorative ZrNxOy thin films. Surf. Coat. Technol. 2005, 200, 748–752. [Google Scholar] [CrossRef] [Green Version]
- Mohamed, S.; Abd El-Rahman, A.; Ahmed, M. Investigation of zirconium oxynitride thin films deposited by reactive pulsed magnetron sputtering. J. Phys. D Appl. Phys. 2007, 40, 7057–7062. [Google Scholar] [CrossRef]
- Rizzo, A.; Signore, M.A.; Mirenghi, L.; Di Luccio, T. Synthesis and characterization of titanium and zirconium oxynitride coatings. Thin Solid Films 2009, 517, 5956–5964. [Google Scholar] [CrossRef]
- Huang, J.H.; Chang, K.H.; Yu, G.P. Synthesis and characterization of nanocrystalline ZrNxOy thin films on Si by ion plating. Surf. Coat. Technol. 2007, 201, 6404–6413. [Google Scholar] [CrossRef]
- Chen, Y.M.; Liao, B.; Wu, X.Y.; Zhang, H.X.; Zhang, X. Synthesis and characterization of zirconium oxynitride coatings deposited by filtered cathodic vacuum arc technology. Surf. Coat. Technol. 2013, 228, S210–S213. [Google Scholar] [CrossRef]
- Laurikaitis, M.; Dudonis, J.; Milčius, D. Deposition of zirconium oxynitride films by reactive cathodic arc evaporation and investigation of physical properties. Thin Solid Films 2008, 516, 1549–1552. [Google Scholar] [CrossRef]
- Vaz, F.; Carvalho, P.; Cunha, L.; Rebouta, L.; Moura, C.; Alves, E.; Ramos, A.R.; Cavaleiro, A.; Goudeau, P.; Riviere, J.P. Property change in ZrNxOy thin films: Effect of the oxygen fraction and bias voltage. Thin Solid Films 2004, 469–470, 11–17. [Google Scholar] [CrossRef] [Green Version]
- Carvalho, P.; Vaz, F.; Rebouta, L.; Cunha, L.; Tavares, C.J.; Moura, C.; Alves, E.; Cavaleiro, A.; Goudeau, P.; Le Bourhis, E.; et al. Structural, electrical, optical, and mechanical characterizations of decorative ZrOxNy thin films. J. Appl. Phys. 2005, 98, 023715. [Google Scholar] [CrossRef] [Green Version]
- Da Silva Oliveira, C.I.; Martínez-Martínez, D.; Apreutesei, M.; Rampelberg, G.; Detavernier, C.; Cunha, L. Thermal stability of Zr-O-N(:Ti) thin films prepared by magnetron sputtering. Vacuum 2018, 151, 148–155. [Google Scholar] [CrossRef]
- Vaz, F.; Cerqueira, P.; Rebouta, L.; Nascimento, S.M.C.; Alves, E.; Goudeau, P.; Riviere, J.P.; Pischow, K.; de Rijk, J. Structural, optical and mechanical properties of coloured TiNxOy thin films. Thin Solid Films 2004, 447–448, 449–454. [Google Scholar] [CrossRef]
- Huang, J.H.; Hu, Y.Y.; Yu, G.P. Structure evolution and mechanical properties of ZrNxOy thin film deposited on Si by magnetron sputtering. Surf. Coat. Technol. 2011, 205, 5093–5102. [Google Scholar] [CrossRef]
- Rawal, S.K.; Chawla, A.K.; Chawla, V.; Jayaganthan, R.; Chandra, R. Structural, optical and hydrophobic properties of sputter deposited zirconium oxynitride films. Mater. Sci. Eng. B 2010, 172, 259–266. [Google Scholar] [CrossRef]
- Khan, I.A.; Ikhlaq, U.; Farid, A.; Rawat, R.S.; Ahmad, R. Role of Nitrogen Pressure on the Structural and Mechanical Properties of ZrON Composite Films Deposited by Plasma Focus Device. J. Fusion Energ. 2014, 34, 1284–1296. [Google Scholar] [CrossRef]
- Warcholinski, B.; Gilewicz, A.; Lupicka, O.; Kuprin, A.S.; Tolmachova, G.N.; Ovcharenko, V.D.; Kolodiy, I.V.; Sawczak, M.; Kochmanska, A.E.; Kochmanski, P.; et al. Structure of CrON coatings formed in vacuum arc plasma fluxes. Surf. Coat. Technol. 2017, 309, 920–930. [Google Scholar] [CrossRef]
- Goldstein, J.; Newbury, D.E.; Joy, D.C.; Lyman, C.E.; Echlin, P.; Lifshin, E.; Sawyer, L.; Michael, J.R. Scanning Electron Microscopy and X–ray Microanalysis, 3rd ed.; Springer: New York, NY, USA, 2003; pp. 453–536. [Google Scholar]
- Cullity, B.D. Elements of X-ray Diffraction, 2nd ed.; Addison-Wesley Publishing Company Inc.: London, UK, 1978; pp. 281–292. [Google Scholar]
- Nasser, S.A.; Afify, H.H.; El-Hakim, S.A.; Zayed, M.K. Structural and physical properties of sprayed copper–zinc oxide films. Thin Solid Films 1998, 315, 327–335. [Google Scholar] [CrossRef]
- Romero, J.; Gómez, M.A.; Esteve, J.; Montal, F.; Carreras, L.; Grifol, M.; Lousa, A. CrAlN coatings deposited by cathodic arc evaporation at different substrate bias. Thin Solid Films 2006, 515, 113–117. [Google Scholar] [CrossRef]
- Verein-Deutscher-Ingenieure Normen. Daimler Benz Adhesion Test, VDI 3198; VDI Verlag: Dusseldorf, Germany, 1992. [Google Scholar]
- Fuentes, G.G.; Rodriguez, R.; Avelar-Batista, J.C.; Housden, J.; Montal’a, F.; Carreras, L.J.; Cristobal, A.B.; Damborenea, J.J.; Tate, T.J. Recent advances in the chromium nitride PVD process for forming and machining surface protection. J. Mater. Proc. Technol. 2005, 167, 415–421. [Google Scholar] [CrossRef]
- Urgen, M.; Ezirmik, V.; Senel, E.; Kahraman, Z.; Kazmanli, K. The effect of oxygen content on the temperature dependent tribological behavior of Cr–O–N coatings. Surf. Coat. Technol. 2009, 203, 2272–2277. [Google Scholar] [CrossRef]
- Yu, S.; Zeng, Q.; Oganov, A.R.; Frapper, G.; Huang, B.; Niu, H.; Zhang, L. First-principles study of Zr–N crystalline phases: Phase stability, electronic and mechanical properties. RSC Adv. 2017, 7, 4697–4703. [Google Scholar] [CrossRef] [Green Version]
- Yao, S.H.; Su, Y.L. The tribological potential of CrN and Cr(C,N) deposited by multi-arc PVD process. Wear 1997, 212, 85–94. [Google Scholar] [CrossRef]
- Kuznetsova, T.A.; Andreev, M.A.; Markova, L.V. Research of wear resistance of the combined vacuum electroarc coatings on the basis of ZrHf. J. Frict. Wear 2005, 26, 521–529. [Google Scholar]
- Walkowicz, J.; Zavaleyev, V.; Dobruchowska, E.; Murzynski, D.; Donkov, N.; Zykova, A.; Safonov, V.; Yakovin, S. Corrosion properties of zirconium-based ceramic coatings for micro-bearing and biomedical applications. J. Phys. Conf. Ser. 2016, 700, 012026. [Google Scholar] [CrossRef] [Green Version]
- Gautier, C.; Machet, J. Study and elaboration of ternary chromium based compounds (Cr, O, N) deposited by vacuum arc evaporation. Surf. Coat. Technol. 1997, 94–95, 122–427. [Google Scholar] [CrossRef]
- Rebholz, C.; Ziegele, H.; Leyland, A.; Matthew, A. Structure, mechanical and tribological properties of nitrogen-containing chromium coatings prepared by reactive magnetron sputtering. Surf. Coat. Technol. 1999, 115, 222–229. [Google Scholar] [CrossRef]
- Farkas, N.; Zhang, G.; Ramsier, R.D.; Evans, E.A.; Dagata, J.A. Characterization of Zirconium Nitride Films Sputter Deposited with an Extensive Range of Nitrogen Flow Rates. J. Vac. Sci. Technol. A 2008, 26, 297–301. [Google Scholar] [CrossRef] [Green Version]
- Warcholinski, B.; Gilewicz, A.; Lupicka, O.; Rochowicz, J.; Zykova, A.; Safonov, V.; Yakovin, S. Mechanical and tribological characteristics of zirconium based ceramic coatings for micro-bearing application. Problem. Atom. Sci. Technol. 2014, 94, 219–222. [Google Scholar]
- Zhang, S.; Sun, D.; Fu, Y.; Du, H. Effect of sputtering target power on microstructure and mechanical properties of nanocomposite nc-TiN/a-SiN thin films. Thin Solid Films 2004, 447–448, 462–467. [Google Scholar] [CrossRef]
C | Mn | Si | P | S | Cr | W | Mo | V | Cu | Fe |
---|---|---|---|---|---|---|---|---|---|---|
0.82–0.92 | <0.40 | <0.50 | <0.03 | <0.03 | 3.5–4.5 | 6–7 | 4.5–5.5 | 1.7–2.1 | <0.30 | balanced |
Parameter | Ion Etching | Adhesive Layer | ZrON Coating |
---|---|---|---|
Zr cathode current [A] | 75 | 75 | 75 |
Argon pressure [Pa] | 0.5 | 0.5 | - |
Relative oxygen concentration O2(x) = O2/(O2+N2) [%] | - | - | 0, 10, 20, 30, 50, 100 |
Total pressure [Pa] | 0.5 | 0.5 | 2 |
Substrate bias voltage [V] | −1300 | −100 | −100 |
Deposition time [s] | 180 | 300 | 1800 |
Thickness [µm] | - | ~0.1 | ~3 |
Coating | (hkl) Plane | ||||||
---|---|---|---|---|---|---|---|
(111) | (200) | (220) | (311) | (222) | (331) | (420) | |
ZrO(0)N | 0.14 | 0.83 | 1.20 | 0.52 | 1.23 | 0.97 | 2.10 |
ZrO(10)N | 1.06 | 0.67 | 1.46 | 0.52 | 0.98 | 1.03 | 1.28 |
ZrO(20)N | 3.02 | 0.12 | 1.30 | 0.36 | 0.23 | 0.87 | 1.10 |
ZrO(30)N | 1.96 | 0.42 | 1.08 | 0.53 | 0.61 | 1.14 | 1.27 |
ZrO(50)N | 2.23 | 0.46 | 0.31 | - | - | - | - |
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. |
© 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
Share and Cite
Kuprin, A.S.; Gilewicz, A.; Kuznetsova, T.A.; Lapitskaya, V.A.; Tolmachova, G.N.; Warcholinski, B.; Aizikovich, S.M.; Sadyrin, E.V. Structure and Properties of ZrON Coatings Synthesized by Cathodic Arc Evaporation. Materials 2021, 14, 1483. https://doi.org/10.3390/ma14061483
Kuprin AS, Gilewicz A, Kuznetsova TA, Lapitskaya VA, Tolmachova GN, Warcholinski B, Aizikovich SM, Sadyrin EV. Structure and Properties of ZrON Coatings Synthesized by Cathodic Arc Evaporation. Materials. 2021; 14(6):1483. https://doi.org/10.3390/ma14061483
Chicago/Turabian StyleKuprin, Alexander S., Adam Gilewicz, Tatyana A. Kuznetsova, Vasilina A. Lapitskaya, Galina N. Tolmachova, Bogdan Warcholinski, Sergei M. Aizikovich, and Evgeniy V. Sadyrin. 2021. "Structure and Properties of ZrON Coatings Synthesized by Cathodic Arc Evaporation" Materials 14, no. 6: 1483. https://doi.org/10.3390/ma14061483