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Journal: Materials, 2021
Volume: 14
Number: 7478

Article: Microstructures of HfOx Films Prepared via Atomic Layer Deposition Using La(NO3)3·6H2O Oxidants
Authors: by Seon Yong Kim, Yong Chan Jung, Sejong Seong, Taehoon Lee, In-Sung Park and Jinho Ahn
Link: https://www.mdpi.com/1996-1944/14/23/7478

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