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Journal: Materials, 2021
Volume: 14
Number: 7377
Article:
Fabrication of AlGaN High Frequency Bulk Acoustic Resonator by Reactive RF Magnetron Co-sputtering System
Authors:
by
Yu-Chen Chang, Ying-Chung Chen and Chien-Chuan Cheng
Link:
https://www.mdpi.com/1996-1944/14/23/7377
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