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Journal: Materials, 2021
Volume: 14
Number: 5107

Article: Microstructure Evolution in He-Implanted Si at 600 °C Followed by 1000 °C Annealing
Authors: by Zhen Yang, Zhiping Zou, Zeyang Zhang, Yubo Xing and Tao Wang
Link: https://www.mdpi.com/1996-1944/14/17/5107

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