Synthesis Based on a Preceramic Polymer and Alumina Nanoparticles via UV Lithography for High Temperature Applications
Abstract
:1. Introduction
2. Experimental Section
2.1. Materials
2.2. Si Wafer Treatment
2.3. Experimental Procedure
2.4. Characterizations
2.4.1. Thickness Measurement
2.4.2. Fourier Transform Infrared (FT-IR) Spectroscopy
2.4.3. X-Ray Diffraction (XRD)
2.4.4. Thermal Analysis (TGA/DSC)
2.4.5. Scanning Electron Microscopy (SEM)
3. Results and Discussion
3.1. Spectroscopic Ellipsometry Measurement
3.2. Fourier-Transformed Infrared Spectroscopy
3.3. X-Ray Diffraction
3.4. Scanning Electron Microscopy
3.5. Thermogravimetric Analysis
3.6. Differential Scanning Calorimetry
4. Conclusions
Supplementary Materials
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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p(PDMS-co-AMS) | Al2O3/ p(PDMS-co-AMS) | |
---|---|---|
Thickness (nm) | 18.1 ± 0.1 | 20.8 ± 1.4 |
Sample | Tg (°C) | Ton (°C) | Tend (°C) | Tm (°C) |
---|---|---|---|---|
Before Pyrolysis | 978 | 871 | 1020 | 1146 |
900°C | 898 | 838 | 960 | 1116 |
1000°C | 922 | 834 | 987 | 1111 |
1100°C | 905 | 844 | 963 | 1122 |
1200°C | 890 | 830 | 933 | 1119 |
1300°C | 919 | 846 | 961 | 1114 |
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Almeataq, M.S.; Alosime, E.M. Synthesis Based on a Preceramic Polymer and Alumina Nanoparticles via UV Lithography for High Temperature Applications. Materials 2020, 13, 1140. https://doi.org/10.3390/ma13051140
Almeataq MS, Alosime EM. Synthesis Based on a Preceramic Polymer and Alumina Nanoparticles via UV Lithography for High Temperature Applications. Materials. 2020; 13(5):1140. https://doi.org/10.3390/ma13051140
Chicago/Turabian StyleAlmeataq, Mohammed S., and Eid M. Alosime. 2020. "Synthesis Based on a Preceramic Polymer and Alumina Nanoparticles via UV Lithography for High Temperature Applications" Materials 13, no. 5: 1140. https://doi.org/10.3390/ma13051140