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Journal: Sensors, 2009
Volume: 9
Number: 6219

Article: Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique
Authors: by Pin-Hsu Kao, Ching-Liang Dai, Cheng-Chih Hsu and Chyan-Chyi Wu
Link: https://www.mdpi.com/1424-8220/9/8/6219

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