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Journal: Sensors, 2009
Volume: 9
Number: 6219
Article:
Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique
Authors:
by
Pin-Hsu Kao, Ching-Liang Dai, Cheng-Chih Hsu and Chyan-Chyi Wu
Link:
https://www.mdpi.com/1424-8220/9/8/6219
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