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Journal: Sensors, 2009
Volume: 9
Number: 556

Article: Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach
Authors: by Stefano Mariani, Aldo Ghisi, Alberto Corigliano and Sarah Zerbini
Link: https://www.mdpi.com/1424-8220/9/1/556

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